| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor in which air damping effect is reduced while maintaining high sensitivity. <P>SOLUTION: An acceleration sensor includes a movable electrode 4 that moves in response to a physical quantity applied from the outside, an upper fixing plate 2a arranged facing the upper surface of the movable electrode 4, and a lower fixing plate 2b arranged facing the under surface of the movable electrode 4. Dug sections are formed in areas 4a and 4b having large air damping effect on the upper surface of the movable electrode 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
