| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive resist stripping agent that shows excellent resist stripping property and does not corrode aluminum or copper. <P>SOLUTION: The resist stripping agent contains a noncyclic ethylene amine, octylic acid and a cyclic amine, and the agent is used to strip a resist for copper wiring and a resist for aluminum wiring. <P>COPYRIGHT: (C)2012,JPO&INPIT |
