| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum dryer which can reduce uneven drying of a coating film. <P>SOLUTION: The vacuum dryer comprises a chamber in which a substrate W is housed and dried by bringing the interior into vacuum environment, a transfer device which transfers the substrate W to the inside and outside of the chamber, a substrate support 30 which supports the substrate W when it is dried, and a current plate 41 which controls the air flow near the lower surface of the substrate W. When the substrate W housed in the chamber is dried, the transfer device, the substrate support 30, and the current plate 41 are moved relatively to form a state where a drying contact point 32 at the upper end of the substrate support 30 supports the substrate, and the upper surface of the current plate 41 is located above a transfer contact point 22 of the transfer device before drying is performed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
