摘要 |
An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.
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申请人 |
PARK HONG-SICK;LEE WANG-WOO;KIM SANG-TAE;LEE JOON-WOO;PARK YOUNG-CHUL;JIN YOUNG-JUN;KANG KYONG-MIN;YOON YOUNG-JIN;LEE SUCK-JUN;KWON O-BYOUNG;YU IN-HO;JANG SANG-HOON;LIM MIN-KI;KIM DONG-KI;DONGWOO FINE-CHEM CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK HONG-SICK;LEE WANG-WOO;KIM SANG-TAE;LEE JOON-WOO;PARK YOUNG-CHUL;JIN YOUNG-JUN;KANG KYONG-MIN;YOON YOUNG-JIN;LEE SUCK-JUN;KWON O-BYOUNG;YU IN-HO;JANG SANG-HOON;LIM MIN-KI;KIM DONG-KI |