发明名称 ETCHANT, DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME
摘要 An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.
申请公布号 US2012153287(A1) 申请公布日期 2012.06.21
申请号 US201113168408 申请日期 2011.06.24
申请人 PARK HONG-SICK;LEE WANG-WOO;KIM SANG-TAE;LEE JOON-WOO;PARK YOUNG-CHUL;JIN YOUNG-JUN;KANG KYONG-MIN;YOON YOUNG-JIN;LEE SUCK-JUN;KWON O-BYOUNG;YU IN-HO;JANG SANG-HOON;LIM MIN-KI;KIM DONG-KI;DONGWOO FINE-CHEM CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK HONG-SICK;LEE WANG-WOO;KIM SANG-TAE;LEE JOON-WOO;PARK YOUNG-CHUL;JIN YOUNG-JUN;KANG KYONG-MIN;YOON YOUNG-JIN;LEE SUCK-JUN;KWON O-BYOUNG;YU IN-HO;JANG SANG-HOON;LIM MIN-KI;KIM DONG-KI
分类号 H01L33/16;C09K13/06;C09K13/08 主分类号 H01L33/16
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