发明名称 |
SPIN CONDUCTANCE STRUCTURE, MEMORY ELEMENT, SPIN TRANSISTOR, AND METHOD FOR FORMING SPIN CONDUCTANCE STRUCTURE |
摘要 |
Provided is technology for high-quality epitaxial growth of a group IV semiconductor (111) surface on a ferromagnetic Heusler alloy (111) surface. This method for forming a spin conductance structure includes: a first ferromagnetic lamination step (S41) in which a single-crystal ferromagnetic Heusler alloy (X(3-x)YxZ, where Z corresponds to the group IV semiconductor) that contains a group IV semiconductor in the constituent elements is laminated on a group IV semiconductor substrate having a surface with a Miller index (111) as the growth surface; a metal supply stopping step (S42) that stops the supply of a metal (corresponding to X(3-x)Yx) of the elements composing the ferromagnetic Heusler alloy; a semiconductor supply stopping step (S44) for stopping the supply of the group IV semiconductor (corresponding to Z) of the elements composing the ferromagnetic Heusler alloy in a state (S43) where the group IV semiconductor surface has been formed on the outermost surface; and a semiconductor lamination step (S45) for laminating the group IV semiconductor on the group IV semiconductor surface formed on the outermost surface. |
申请公布号 |
WO2012081694(A1) |
申请公布日期 |
2012.06.21 |
申请号 |
WO2011JP79168 |
申请日期 |
2011.12.16 |
申请人 |
KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION;HAMAYA KOHEI;SAWANO KENTARO |
发明人 |
HAMAYA KOHEI;SAWANO KENTARO |
分类号 |
H01L21/8246;H01F10/30;H01F10/32;H01L27/105;H01L29/66;H01L29/82;H01L43/08;H01L43/10 |
主分类号 |
H01L21/8246 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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