发明名称 SPIN CONDUCTANCE STRUCTURE, MEMORY ELEMENT, SPIN TRANSISTOR, AND METHOD FOR FORMING SPIN CONDUCTANCE STRUCTURE
摘要 Provided is technology for high-quality epitaxial growth of a group IV semiconductor (111) surface on a ferromagnetic Heusler alloy (111) surface. This method for forming a spin conductance structure includes: a first ferromagnetic lamination step (S41) in which a single-crystal ferromagnetic Heusler alloy (X(3-x)YxZ, where Z corresponds to the group IV semiconductor) that contains a group IV semiconductor in the constituent elements is laminated on a group IV semiconductor substrate having a surface with a Miller index (111) as the growth surface; a metal supply stopping step (S42) that stops the supply of a metal (corresponding to X(3-x)Yx) of the elements composing the ferromagnetic Heusler alloy; a semiconductor supply stopping step (S44) for stopping the supply of the group IV semiconductor (corresponding to Z) of the elements composing the ferromagnetic Heusler alloy in a state (S43) where the group IV semiconductor surface has been formed on the outermost surface; and a semiconductor lamination step (S45) for laminating the group IV semiconductor on the group IV semiconductor surface formed on the outermost surface.
申请公布号 WO2012081694(A1) 申请公布日期 2012.06.21
申请号 WO2011JP79168 申请日期 2011.12.16
申请人 KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION;HAMAYA KOHEI;SAWANO KENTARO 发明人 HAMAYA KOHEI;SAWANO KENTARO
分类号 H01L21/8246;H01F10/30;H01F10/32;H01L27/105;H01L29/66;H01L29/82;H01L43/08;H01L43/10 主分类号 H01L21/8246
代理机构 代理人
主权项
地址