| 发明名称 |
OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE |
| 摘要 |
An optical system for generating a light beam for treating a substrate arranged in a substrate plane is disclosed. The optical system includes first and second optical arrangements. |
| 申请公布号 |
US2012153189(A1) |
申请公布日期 |
2012.06.21 |
| 申请号 |
US201213352725 |
申请日期 |
2012.01.18 |
| 申请人 |
WANGLER JOHANNES;LAYH MICHAEL;ZENZINGER MARKUS;MUENZ HOLGER;CARL ZEISS LASER OPTICS GMBH |
发明人 |
WANGLER JOHANNES;LAYH MICHAEL;ZENZINGER MARKUS;MUENZ HOLGER |
| 分类号 |
B01J19/12 |
主分类号 |
B01J19/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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