发明名称 POLISHING HEAD RETAINING RING
摘要 <p>A retaining ring for the polishing head in chemical mechanical polishing that in an embodiment distributes heat evenly by a heat exchanger means embedded within or on the lower surface of the ring that reduces the discrepancy in the temperature about different points of the lower surface of the ring in contact with or facing the polishing pad during chemical mechanical polishing.</p>
申请公布号 WO2012082115(A1) 申请公布日期 2012.06.21
申请号 WO2010US60330 申请日期 2010.12.14
申请人 ARACA, INC.;PHILIPOSSIAN, ARA;GOLDSTEIN, MICHAEL;SAMPURNO, YASA 发明人 PHILIPOSSIAN, ARA;GOLDSTEIN, MICHAEL;SAMPURNO, YASA
分类号 H01L21/304;B24B37/04 主分类号 H01L21/304
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