APPARATUS FOR ORGANIC LAYER DEPOSITION

摘要

PURPOSE: An organic layer deposition apparatus is provided to ensure application to a large-substrate production line and easy recycle of a deposition material. CONSTITUTION: An organic layer deposition apparatus(100) comprises a evaporation source, an evaporation source nozzle unit, a patterning slit sheet, and an interval measuring unit. The pattering slit sheet has a plurality of patterning slits in a second direction vertical to a first direction and is arranged opposite to the evaporation source nozzle unit. The interval measuring unit is arranged in a vacuum chamber and measures the interval between a substrate transferred in the first direction and the patterning slit sheet. Deposition is implemented on the substrate which is transferred in the first direction as being separated from the organic layer deposition apparatus.