| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a safe and long-life ion source. <P>SOLUTION: An ion source 1 comprises: an anode electrode 2 formed of a circular thin plate or a core wire; a cathode electrode 3 having a body part 3c which is formed between one end 3a and the other end 3b of the cathode electrode 3 in an annular shape or a cylindrical shape, and the central axis of which the anode electrode 2 is positioned on; a heating power supply 4 for supplying power between the one end and the other end of the cathode electrode 3 to heat the body part 3c; and a main power supply 5 for applying a voltage between the anode electrode 2 and the cathode electrode 3 so that a potential of the anode electrode 2 is higher than that of the cathode electrode 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
