| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a master disk manufacturing control method by which a pattern is drawn with high accuracy as designed at an arbitrary rotational speed of a turn table to form a format information area. <P>SOLUTION: When a format information area is formed on a substrate on a turn table rotated at an arbitrary rotational speed, electronic beam emission on/off control is executed based on a fixed clock signal to draw a pattern by the electronic beam emission. At this time, based on pattern information and the rotational speed of the turn table, the timing of control for switching between electronic beam emission on and off states is calculated. Also, until measurement based on the fixed clock signal is made only for the calculated timing, the electronic beam is emitted to the substrate. In this way, since a variable frequency clock is not employed and the accuracy in pattern drawing does not depend on the accuracy of the encoder pulse signal generation, a pattern can be drawn on the substrate with high accuracy as designed even when the turn table is rotated at the arbitrary speed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
