APPARATUS AND METHOD FOR TREATING LONG-SIZED SUBSTRATE, EQUIPPED WITH GAS INTRODUCTION MECHANISM, AND METHOD FOR CONVEYING LONG-SIZED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for treatment of a long-sized substrate, capable of inhibiting the occurrence of such a problem that a friction coefficient is reduced and thus the rotation drive of a can roll (cooling roll) hardly transmit to a film.

SOLUTION: There is provided the apparatus 70 for treatment of the long-sized substrate with thermal load performing while partially winding the long-sized substrate F conveyed by roll-to-roll in a vacuum chamber 71 on the can roll 76 provided with the gas introduction holes 15 on an outer peripheral face. The feed rolls 75 and 81 interleaving the substrate F between those and the can roll 76 are provided in front and rear sides of the conveying path defined on the outer peripheral face of the can roll. On the outer peripheral face of at least one of the feed rolls 75 and 81, the spiral grooves 30 having the patterns for spreading the substrate F in a width direction with conveying of the substrate F are formed axisymmetrically with respect to the center line of the conveying paths of the substrate F.

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