| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for regenerating a glass substrate for a color filter that removes a residue such as resin, a constituent used in pattern formation, without polishing the entire surface of the glass substrate in regenerating a glass substrate for a color filter. <P>SOLUTION: A method and an apparatus are provided that are used to regenerate a glass substrate for a color filter, on which a pattern is formed with a light-shielding layer composed of at least photosensitive black resin, and a photosensitive coloring layer. The apparatus comprises: first means that peels off, removes and washes resin of the light-shielding layer and photosensitive coloring layer using aqueous cleaning fluid for a defective part of the pattern formation; second means that then washes the glass substrate with water and dries the glass substrate; third means that detects a residue using a flaw inspection machine; and fourth means that removes the residue detected by image recognition by the third means, by illuminating the residue with laser beam. <P>COPYRIGHT: (C)2012,JPO&INPIT |
