发明名称 |
COMPOSITE SACRIFICIAL STRUCTURE FOR RELIABLY CREATING A CONTACT GAP IN A MEMS SWITCH |
摘要 |
The present Disclosure provides for fabrication devices and methods for manufacturing a micro-electromechanical system (MEMS) switch on a substrate. The MEMS fabrication device may have a first and second sacrificial layer that form the mold of an actuation member. The actuation member is formed over the first and second sacrificial layers to manufacture a MEMS switch from the MEMS fabrication device.
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申请公布号 |
US2012156820(A1) |
申请公布日期 |
2012.06.21 |
申请号 |
US20100973105 |
申请日期 |
2010.12.20 |
申请人 |
KIM SANGCHAE;RF MICRO DEVICES, INC. |
发明人 |
KIM SANGCHAE |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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