发明名称 ELECTROPLATED LEAD-FREE BUMP DEPOSITION
摘要 A method of forming a metal feature on a workpiece with deposition is provided. The method includes providing an under bump metal layer for solder of an electronic device on the workpiece, depositing a substantially pure tin layer directly to the under bump metal layer, and depositing a tin silver alloy layer onto the substantially pure tin layer.
申请公布号 WO2012083100(A2) 申请公布日期 2012.06.21
申请号 WO2011US65324 申请日期 2011.12.16
申请人 NEXX SYSTEMS, INC.;GOODMAN, DANIEL, L.;KEIGLER, ARTHUR;CHIU, JOHANNES;LIU, ZHENQUI 发明人 GOODMAN, DANIEL, L.;KEIGLER, ARTHUR;CHIU, JOHANNES;LIU, ZHENQUI
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