| 摘要 |
PURPOSE: A production process for polysilicon and a production apparatus for the same are provided to improve stability and reduce production costs by manufacturing polysilicon without chlorine. CONSTITUTION: In a production process for polysilicon and a production apparatus for the same, a metal silicon and an additive are inputted into in a furnace. An argon gas is inputted and heated while maintaining the inside of a furnace vacuum. An argon mixed gas is inputted to the furnace. A cooling gas is inserted into the lower part of the furnace. The temperature of the furnace is dropped by discharging heat of the furnace to the upper part of the furnace. |
