| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an anodization apparatus suitable for automation and batch processing by devising a substrate holding mechanism. <P>SOLUTION: In an anodization apparatus, when a plurality of substrates are loaded on a first support unit 57 by alienating the first support unit 57 and a second support unit 73 disposed in a storage tank 9, the plurality of substrates are supported such that only the lower parts of the peripheral surfaces thereof are liquid-tight with an electrolyte solution. When the second support unit 73 is coupled to the first support unit 57, the plurality of substrates are supported in a state where the remaining parts of the peripheral surfaces of the substrates are liquid-tight with the electrolyte solution, whereby the entire peripheral surfaces of the substrates are liquid-tight with the electrolyte solution. By allowing the first support unit 57 and the second support unit 73 to serve as a detachable substrate holder 41, the plurality of substrates are mechanically carried in or out to provide an anodization apparatus suitable for automation and batch processing. <P>COPYRIGHT: (C)2012,JPO&INPIT |
