| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor wafer testing method capable of testing whether each optical semiconductor device is normally operated or not, before completion. <P>SOLUTION: The semiconductor wafer testing method includes a step for supplying electric signals to a light absorption part into a light absorption condition in a semiconductor wafer provided with a plurality of light emitting parts, and the light absorption part optically coupled with the light emitting parts in front of and at a rear part of the plural light emitting parts and absorbing lights by supplying the electric signals; a step for emitting lights at the light emitting parts; and a step for detecting light-emission of the light emitting parts. <P>COPYRIGHT: (C)2012,JPO&INPIT |
