| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an anodization apparatus capable of performing batch processing and enhancing an operation rate by minimizing electrode exchange frequency. <P>SOLUTION: In an anodization apparatus, if a substrate holder 41 disposed in a storage tank 9 is allowed to hold a plurality of substrates and electrodes 21 and 23 are electrified, ions move between electrode tanks 21 and 23, which causes a chemical conversion reaction on the plurality of substrates through ion-exchange membranes 29 and 35. Therefore, batch processing that processes the plurality of substrates becomes possible. Moreover, the concentration of the electrolyte solution stored in electrode tanks 5 and 7 is set to be lower than that of the electrolyte solution stored in the storage tank 9. Therefore, since the chemical conversion reaction in the electrode tanks 5 and 7 is suppressed as compared to the inside of the storage tank 9, a local chemical conversion reaction caused at the electrodes 21 and 23 in the electrode tanks 5 and 7 is suppressed. Consequently, the degradation of the electrodes 21 and 23 can be minimized to enhance the operation rate of the apparatus. <P>COPYRIGHT: (C)2012,JPO&INPIT |
