| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a zinc oxide-based transparent conductive film having a good conductivity and surface smoothness and workability. <P>SOLUTION: The transparent conductive multilayer film is formed on a base material 1, and includes: a base layer 11 containing a compound of an element of the group III or IV of the periodic table; and a conductive film 12 formed on the base layer 11 and containing zinc oxide. As for the conductive film 12, of diffraction lines of zinc oxide (002) plane detected by X-ray diffraction using CuKα rays, the diffraction line having a diffraction angle 2θ which meets the condition 33.00°≤2θ≤35.00° has an intensity I of 1000 (cps) or smaller, and the ratio I/t of the intensity I to the thickness t of the conductive film is 0-15.0 (cps/nm). <P>COPYRIGHT: (C)2012,JPO&INPIT |
