VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE

摘要

A vapor deposition apparatus (50) of the present invention forms a film on a substrate (60) on which a film is to be formed, and is provided with: a vapor deposition source (91) that has a plurality of ejection ports (92) through which vapor deposition particles are ejected onto the substrate (60), said ejection ports (92) being arranged in a line or lines; a vapor deposition source crucible (93) that supplies the vapor deposition particles to the vapor deposition source (91) through a pipe (94) that is connected to one end of each line of the ejection ports (92) in the vapor deposition source (91); a moving means that moves the substrate (60) relative to the vapor deposition source (91); and a rotating mechanism (100) that rotates the vapor deposition source (91).