NANOSENSER AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A nano sensor and manufacturing method thereof are provided to manufacture a thin porous layer not to seclude a movement of a DNA polymer passing through a nano pore. CONSTITUTION: A nano sensor(100) comprises a substrate(10), a first layer(20), and a second layer(30). A hole(16) is formed on the substrate. A first layer is arranged on the substrate. A first nano pore(25) connected to the hole is formed on the first layer. The second layer formed with porous materials is arranged in the first layer.