PLASMA PROCESSING APPARATUS

摘要

PURPOSE: A plasma processing device is provided to facilitate maintenance and repair processes by separating a top electrode unit. CONSTITUTION: A top electrode unit(10) includes a top plate(11), a gas spray plate(12), and a power applying unit(30). A heater installing unit(14) includes a heater for heating a top electrode unit. A shower head(13) is combined with the lower side of the gas spraying plate for spraying gas. A bolt(35) passes through a bolt hole(35a) of a first connector(31) and is combined with the combination groove of the top plate. A protrusion unit(31a) of the first connector is combined with a groove unit(32a) of a second connector.