发明名称 Lithography Masks, Systems, and Manufacturing Methods
摘要 Lithography masks, lithography systems, methods of manufacturing lithography masks, methods of altering material layers of semiconductor devices, and methods of manufacturing semiconductor devices are disclosed. In one embodiment, a lithography mask includes a first pattern for at least one material layer of at least one die, the first pattern being oriented in a first position. The lithography mask includes a second pattern for at least one material layer of the at least one die, the second pattern being oriented in a second position. The second position is different than the first position.
申请公布号 US2012155608(A1) 申请公布日期 2012.06.21
申请号 US201213406301 申请日期 2012.02.27
申请人 SCHROEDER UWE PAUL;INFINEON TECHNOLOGIES AG 发明人 SCHROEDER UWE PAUL
分类号 G21K5/00 主分类号 G21K5/00
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