发明名称 |
ORIENTED CARBON NANOTUBE MANUFACTURING METHOD |
摘要 |
Disclosed is a method capable of accelerating the growth of oriented carbon nanotubes when manufacturing the oriented carbon nanotubes by a plasma CVD. Under the circulation of a gas which is the raw material of the carbon nanotubes, plasma is generated by an antenna (6) provided in a depressurized treatment chamber (2), and substrates (9, 15) provided with a reaction prevention layer and a catalyst material layer which are formed on a base material are held at a distance, to which a radical can reach and an attack of an ion generated as a by-product of the radical can be avoided, from a plasma generation area (7). The tip (6a) of the antenna (6) can be controlled so as to match with the position of the anti-node of a stationary wave (27) of microwaves.
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申请公布号 |
US2012156392(A1) |
申请公布日期 |
2012.06.21 |
申请号 |
US201013391918 |
申请日期 |
2010.08.30 |
申请人 |
KAWARADA HIROSHI;KATO RYOGO;OHASHI TOSHIYUKI;TOKUNE TOSHIO;NIKAWA HIDEFUMI;WASEDA UNIVERSITY;HONDA MOTOR CO., LTD. |
发明人 |
KAWARADA HIROSHI;KATO RYOGO;OHASHI TOSHIYUKI;TOKUNE TOSHIO;NIKAWA HIDEFUMI |
分类号 |
C23C16/26;B05D3/06;B82Y40/00 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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