POROUS FILMS BY BACKFILLING WITH REACTIVE COMPOUNDS
摘要
The invention provides methods for modifying one or more properties of porous thin films. In such methods, a formulation comprising a reactive species is applied to the porous thin film and allowed to crosslink. In some embodiments, the crosslinked network thus formed imparts increased mechanical strength and wear resistance to the porous thin films.
申请公布号
WO2012082611(A2)
申请公布日期
2012.06.21
申请号
WO2011US64397
申请日期
2011.12.12
申请人
SVAYA NANOTECHNOLOGIES, INC.;KROGMAN, KEVIN;OLMEIJER, DAVID;SHAH, RAJUL;WANG, BENJAMIN
发明人
KROGMAN, KEVIN;OLMEIJER, DAVID;SHAH, RAJUL;WANG, BENJAMIN