发明名称 METHOD FOR MANUFACTURING A POLYCRYSTALLINE SILICON THIN FILM
摘要 Provided is an apparatus for supplying an electric field, comprising: a power supply unit including an electrode terminal for supplying power to a conductive layer; and a pad unit which is spaced apart from the electrode terminal, and which includes n (where n is an integer greater than 2) conductive pads, wherein the pad unit is rotatable about a rotational axis, which is an imaginary straight line parallel to the lengthwise direction of the electrode terminal.
申请公布号 WO2012047008(A3) 申请公布日期 2012.06.21
申请号 WO2011KR07353 申请日期 2011.10.05
申请人 ENSILTECH CORPORATION;RO, JAE-SANG;HONG, WON-EUI 发明人 RO, JAE-SANG;HONG, WON-EUI
分类号 H01L21/324;H01L29/786 主分类号 H01L21/324
代理机构 代理人
主权项
地址