发明名称 |
METHOD FOR MANUFACTURING A POLYCRYSTALLINE SILICON THIN FILM |
摘要 |
Provided is an apparatus for supplying an electric field, comprising: a power supply unit including an electrode terminal for supplying power to a conductive layer; and a pad unit which is spaced apart from the electrode terminal, and which includes n (where n is an integer greater than 2) conductive pads, wherein the pad unit is rotatable about a rotational axis, which is an imaginary straight line parallel to the lengthwise direction of the electrode terminal. |
申请公布号 |
WO2012047008(A3) |
申请公布日期 |
2012.06.21 |
申请号 |
WO2011KR07353 |
申请日期 |
2011.10.05 |
申请人 |
ENSILTECH CORPORATION;RO, JAE-SANG;HONG, WON-EUI |
发明人 |
RO, JAE-SANG;HONG, WON-EUI |
分类号 |
H01L21/324;H01L29/786 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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