| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle frame cleaning method allowing high cleanliness without damaging a surface of a pellicle frame. <P>SOLUTION: While a pellicle frame is kept in a cleaning jig, ultrapure water is made flow upward from below the pellicle frame so that the pellicle frame floats off the cleaning jig to perform ultrasonic cleaning, where the flow velocity of ultrapure water flowing upward from below the pellicle frame is preferably in the range of 5-25 mm/sec. <P>COPYRIGHT: (C)2012,JPO&INPIT |
