| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polarization optical element and a true-zero order wavelength plate that function in an UV region by using material and production approach different from conventional ones. <P>SOLUTION: Birefringence porous silicon is oxidized to produce birefringence porous silica. Further, the degree of refractive index anisotropy of the porous silica is controlled by controlling an oxidizing condition. By controlling film thickness and the degree of refractive index anisotropy, a wavelength plate is produced, which functions at a target wavelength that functions in the UV region. The oxidizing condition and refractive index anisotropy have correlation. The oxidizing anneal temperature is controlled so as to be 800 to 1000°C, thereby obtaining birefringence porous silica that has less refractive index anisotropy. <P>COPYRIGHT: (C)2012,JPO&INPIT |
