MICRO-PATTERN FORMING METHOD, AND MICRO-CHANNEL TRANSISTOR AND MICRO-CHANNEL LIGHT-EMITTING TRANSISTOR FORMING METHOD USING SAME
摘要
Provided is a micro-pattern forming method according to one aspect of the present invention. The micro-pattern forming method comprises the steps of: forming an organic wire or organic-inorganic hybrid wire mask pattern having a circular or elliptical cross-section on a substrate; forming a material layer on the entire surface of the substrate, on which the organic wire or organic-inorganic hybrid wire mask pattern has been formed; and removing the organic wire or organic-inorganic hybrid wire mask pattern from the substrate so as to leave only the parts of the material layer on which the organic wire or organic-inorganic hybrid wire mask pattern was not formed.