发明名称 MICRO-PATTERN FORMING METHOD, AND MICRO-CHANNEL TRANSISTOR AND MICRO-CHANNEL LIGHT-EMITTING TRANSISTOR FORMING METHOD USING SAME
摘要 Provided is a micro-pattern forming method according to one aspect of the present invention. The micro-pattern forming method comprises the steps of: forming an organic wire or organic-inorganic hybrid wire mask pattern having a circular or elliptical cross-section on a substrate; forming a material layer on the entire surface of the substrate, on which the organic wire or organic-inorganic hybrid wire mask pattern has been formed; and removing the organic wire or organic-inorganic hybrid wire mask pattern from the substrate so as to leave only the parts of the material layer on which the organic wire or organic-inorganic hybrid wire mask pattern was not formed.
申请公布号 WO2012047042(A3) 申请公布日期 2012.06.21
申请号 WO2011KR07413 申请日期 2011.10.06
申请人 POSTECH ACADEMY-INDUSTRY FOUNDATION;MIN, SUNG YONG;KIM, TAE SIK;LEE, TAE-WOO 发明人 MIN, SUNG YONG;KIM, TAE SIK;LEE, TAE-WOO
分类号 B82B3/00;B82B1/00 主分类号 B82B3/00
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