| 摘要 |
<p>A differential pressure measuring device comprises a master container, a work container, a differential pressure sensor, an atmospheric pressure adjusting means, a test pressure applying means, and a control means for finding a temperature compensation value on the basis of the measurement value of the differential pressure sensor, correcting the measurement value of the differential pressure sensor by the temperature compensation value, and determining the leakage of the work container, and is characterized by comprising an intra-work container pressure measuring means (WP) for measuring the internal pressure of the work container, and in that the control means is set such that the timing of measurement by the differential pressure sensor when the temperature compensation value is measured is determined on the basis of the measurement value of the intra-work container pressure measuring means, the density change of gas is found on the basis of a differential pressure value related to atmospheric pressure detected from the intra-work container pressure measuring means and obtained by the operation of the atmospheric pressure adjusting means and a differential pressure value related to test pressure obtained by the operation of the test pressure applying means, and either the temperature compensation value or the differential pressure value measured by operating the test pressure applying means is corrected by the density change.</p> |
