摘要 |
<P>PROBLEM TO BE SOLVED: To improve reliability of a waveguide type photodiode. <P>SOLUTION: An optical semiconductor comprises an optical waveguide 50 made of a semiconductor and having a mesa type structure; and a photodiode 52 made of a semiconductor, connected to the optical waveguide 50 and including an optical waveguide structure with a wider mesa type structure than the optical waveguide 50. Since the waveguide of the photodiode 52 is wide, a light waveguide region may be protected even when a defect is caused in the vicinity of a side face of a core 20, and hence, the reliability of the photodiode 52 may be improved. <P>COPYRIGHT: (C)2012,JPO&INPIT |