| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor having high sensitivity and improved properties. <P>SOLUTION: The pressure sensor comprises: a container 21 formed of a cylindrical part 23 having a hollow hole 22 inside the cylindrical part and a flat plate part 24 closing an upper part of the hollow hole of the cylindrical part; an oscillator which is provided on an upper face of the flat plate part of the container and includes a drive electrode and a detection electrode; and a processing circuit 35 which is provided to the container, inputs driving signals into the drive electrode in the oscillator, and performs processing of output signals from the detection electrode in the oscillator. The processing circuit detects change in natural frequency of the oscillator to detect pressure of liquid 36 to be detected with which the hollow hole is filled. <P>COPYRIGHT: (C)2012,JPO&INPIT |
