| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit device that has a slit opening having a very narrow width (submicron, or nano level) and a length much longer than the width, and that can be used for the control of X rays. <P>SOLUTION: In a slit device, two block gauges 1B and 1C are fixed to a substrate 2B with measurement faces 11 thereof facing downward, and another block gauge 1A to an auxiliary substrate 3 with a measurement face thereof facing upward, in which the flatness and parallelism of these measurement faces are assured. The auxiliary substrate 3 is fixed to a substrate 2A via a movable mechanism 4 that can be expanded and contracted in an arrow direction by a piezo electric element. Seen from the direction of X-rays incoming, a slit opening is formed in which the two edges thereof in the slit width direction are defined by the measurement face 11 of the block gauge 1A and the measurement faces 11 of the block gauge 1B and 1C, and the slit width can be varied from zero in a predetermined range by moving the block gauge 1A using the movable mechanism 4. <P>COPYRIGHT: (C)2012,JPO&INPIT |
