| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wafer transfer apparatus and a wafer transfer method which deal with various wafer arrangements on a boat and transfer wafers by using multiple wafer holding plates to reduce the wafer transfer time. <P>SOLUTION: A wafer transfer apparatus includes at least a first slider, a second slider, and a third slider. The wafer transfer apparatus horizontally moves the first slider and connects the second slider or the second slider and the third slider with the first slider through a connection mechanism so as to move the sliders together. With this structure, one, two, or five wafers on wafer holding plates are transferred to a boat simultaneously. <P>COPYRIGHT: (C)2012,JPO&INPIT |
