| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thickness measurement device capable of measuring thickness of various plate-like objects without replacing a measuring head of an air micrometer, and efficiently measuring thickness at multiple positions of the plate-like object. <P>SOLUTION: The thickness measurement device performs measurement by an air micrometer. A horizontally moving unit 22 having a horizontally moving body 24 which moves horizontally on a surface plate 21 is mounted on the surface plate. A head body 2 of a measuring head 1 of the air micrometer is fixed on the horizontally moving body 24, and a fixed nozzle part 3 having an injection hole is fixed to the head body 2 of the measuring head 1. A movable nozzle part 4 having an injection hole is attached so as to face the fixed nozzle part 3 and be slidable in an approaching and separating direction via a slide mechanism 6. A micrometer head 10 is attached with a moving tip thereof abutting against the head body 2, so as to make the movable nozzle part 4 move slightly in the approaching and separating direction relative to the head body 2 and the fixed nozzle part 3. <P>COPYRIGHT: (C)2012,JPO&INPIT |
