| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an acceleration sensor capable of reducing the offset amount of parasitic capacitance by a further simple structure. <P>SOLUTION: At clearance parts respectively formed between detection electrodes 8a and 8b and one moving electrode 4, and between detection electrodes 9a and 9b and the other moving electrode 5, a frame wall 30 for defining these detection electrodes 8a, 8b, 9a, and 9b and the moving electrodes 4 and 5 is integrally extended from a frame 3. By the frame wall 30, parasitic capacitance is balanced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
