| 摘要 |
A semiconductor device including a semiconductor substrate; a memory cell region formed in the semiconductor substrate and including a plurality of memory cells; a peripheral circuit region formed in the semiconductor substrate; a first element isolation trench with a first width formed in the memory cell region; a second element isolation trench with a second width greater than the first width formed in the peripheral circuit region; a first oxide film formed along an inner surface of the first element isolation trench; a first coating oxide film formed along the first oxide film and filling the first element isolation trench; a second oxide film formed along a sidewall of the second element isolation trench; a third oxide film formed above a bottom of the second element isolation trench; and a second coating oxide film formed above the third oxide film and filling the second element isolation trench. |
