Testing apparatus for avalanche breakdown testing of e.g. insulated gate bipolar transistor, has probe whose opening/closing structure holds operator from accessing substrate accommodated in probe in locked state

摘要

The apparatus (10) has a voltage supply circuit generating supply voltage for being supplied to a test object (200). An inductive load circuit is arranged in a path between the voltage supply circuit and the object. A test substrate (20) is accommodated in a probe (13). The probe comprises an opening/closing structure (15) that holds an operator from accessing the substrate accommodated in the probe in a locked state when the voltage in a predetermined location of the substrate is larger than predetermined voltage.