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发明名称
СПОСОБ СОЗДАНИЯ ТОНКИХ СЛОЕВ ОКСИДА КРЕМНИЯ
摘要
申请公布号
RU1371456(C)
申请公布日期
2012.06.20
申请号
SU19864054773
申请日期
1986.02.12
申请人
发明人
分类号
H01L21/316
主分类号
H01L21/316
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代理人
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地址
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