发明名称 Method for fabricating silicon wafer solar cell
摘要 <p>The invention provides a method for fabricating a silicon wafer solar cell, comprising the following steps: texturing a silicon wafer, forming a p-n junction, performing a wet chemical surface treatment, performing a passivation layer formation process, and performing electrodes formation process, wherein the wet chemical surface treatment comprises the following specific process flow: performing a backside phosphosilicate glass (PSG) removal process, performing an edge isolation and backside polish process, performing a double-side phosphosilicate glass and oxide removal process, and performing a front-side shallow junction formation process.</p>
申请公布号 EP2466650(A2) 申请公布日期 2012.06.20
申请号 EP20110401619 申请日期 2011.10.21
申请人 WAKOM SEMICONDUCTOR CORPORATION 发明人 CHIEN, RAY;HSIEH, JIH-SHUN;LIN, YU-MEI
分类号 H01L31/18 主分类号 H01L31/18
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