Manufacturing Method for Palladium-Copper-Nickel Alloy Hydrogen Separation Membrane

摘要

PURPOSE: A manufacturing method of a palladium-copper-nickel alloy hydrogen separation membrane is provided to enhance durability as well as bonding increase of a support and a coated layer since a functionally graded property is represented by low-temperature reflow heat treatment. CONSTITUTION: A manufacturing method of a palladium-copper-nickel alloy hydrogen separation membrane comprises next steps. A porous nickel metal support member is formed using nano nickel powder. The porous nickel metal support member is fine-polished and plasma-surface-reformed. A palladium layer and a metallic layer with saturation composition weight percent are formed on the porous nickel metal support member by controlling on the thickness ratio of palladium/copper in a high-temperature sputtering process. The palladium layer and the metal layer are reflow-heat-treated at a low temperature and for a long time to form saturation composition of palladium alloy separation membrane.