Infrared detector using suspended bolometric microplates
摘要
The detector has a matrix of bolometric micro plates (14) suspended above a substrate (16) by a thermal insulation and support arm (18) for detecting radiation. A metallic focusing membrane (22) is placed above and around each micro-plate, and openings i.e. slots (26), are formed on the membrane. The openings of the membrane are placed periodically along a predetermined axis according to period less than or equal to ratio of wavelength of range of wavelengths to be detected and average refractive index of medium separating the micro-plate and the membrane.
申请公布号
EP2466283(A1)
申请公布日期
2012.06.20
申请号
EP20110306528
申请日期
2011.11.22
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES