| 摘要 |
<p>A plasma resistant article is composed of an aluminum alloy or anodized aluminum alloy substrate and a thermal sprayed oxide coating which contains yttrium, gadolinium, terbium, dysprosium, holmium or erbium and is endowed with specific characteristics. The article, which has a dense surface and does not require surface polishing, can be used as a component in equipment for manufacturing semiconductors and equipment for manufacturing liquid crystal displays and plasma displays.</p> |
