| 摘要 |
PURPOSE: A plasma processing device is provided to prevent damages to the inner side of a slot unit by installing a protection unit which protects the inner side of the slot unit. CONSTITUTION: A slot unit(70) penetrates through a process chamber(10) to input and output a substrate. A protection unit(90) is inserted into the slot unit of the process chamber and protects the inner side of the slot unit. The protection unit has an outer side corresponding to the inner side of the slot unit and is composed by combining a pair of first members and a pair of second members. The pair of the first members have a length which corresponds to the long side of the slot unit. The pair of the second members have a length which corresponds to the short side of the slot unit. A sealing unit is interposed between the inner side of the slot unit and the outer side of the protection member. |
