发明名称 Semiconductor device including gate electrode having a laminate structure and plug electrically connected thereto
摘要 A semiconductor device includes a semiconductor substrate having a semiconductor layer, a gate electrode, a source region, a drain region, an element separation insulating film layer and a wiring. The gate electrode include a laminated structure having a gate insulating film formed on the semiconductor layer, a metal or a metallic compound formed on the gate insulating film and a polycrystalline silicon layer formed on the metal or metallic compound. The source region and drain region are formed on a surface portion of the semiconductor substrate and sandwich the gate electrode therebetween. The element separation insulating film layer surrounds the semiconductor layer. The wiring is in contact with the metal or metallic compound of the gate electrode.
申请公布号 US8203189(B2) 申请公布日期 2012.06.19
申请号 US20090549298 申请日期 2009.08.27
申请人 TSUCHIYA YOSHINORI;KOYAMA MASATO;KABUSHIKI KAISHA TOSHIBA 发明人 TSUCHIYA YOSHINORI;KOYAMA MASATO
分类号 H01L29/49 主分类号 H01L29/49
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