发明名称 Method of manufacturing transistor
摘要 A method of manufacturing a transistor (300), the method comprising forming a gate (101) on a substrate (102), forming a spacer (201) on lateral side walls of the gate (101) and on an adjacent portion (202) of the substrate (102), modifying material of the spacer (201) so that the modified spacer (301) covers only a lower portion (303) of the lateral side walls of the gate (101), and providing source/drain regions (301) in the modified spacer (301).
申请公布号 US8202782(B2) 申请公布日期 2012.06.19
申请号 US20080676017 申请日期 2008.08.29
申请人 MEUNIER-BELLARD PHILIPPE;HERINGA ANCO;DONKERS JOHANNES;NXP B.V. 发明人 MEUNIER-BELLARD PHILIPPE;HERINGA ANCO;DONKERS JOHANNES
分类号 H01L21/336 主分类号 H01L21/336
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