发明名称 |
DEVICE AND METHOD FOR STACKING OR TRANSPORTING A PLURALITY OF FLAT SUBSTRATES. |
摘要 |
<p>The invention relates to a device for stacking a plurality of silicon wafers, comprising an upright machine carrier for accommodating a plurality of the silicon wafers, wherein the silicon wafers are provided in the machine carrier in a horizontal position. The device comprises three identical loading cassettes for introducing some silicon wafers therein. The machine carrier also comprises accommodating devices for the loading cassettes, wherein a loading cassette comprises a lower supporting surface on which the silicon wafers can be stacked and a rear side extending substantially perpendicularly thereto. The loading cassette is designed in such a way that the side opposite the rear side and the top side are freely accessible.</p> |
申请公布号 |
MX2011012709(A) |
申请公布日期 |
2012.06.19 |
申请号 |
MX20110012709 |
申请日期 |
2010.05.28 |
申请人 |
SCHMID TECHNOLOGY SYSTEMS GMBH.* |
发明人 |
GREBER, REINER;SCHULTZE, THOMAS |
分类号 |
B28D5/00;B65G59/02;H01L21/673;H01L21/677 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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