| 摘要 |
<p>PURPOSE: A photo-masking mirror defilement prevention system is provided to reduce a productivity false step stopping the drive of equipment for cleaning work by minimizing contamination of a mirror plate within or a reflective plate within a stepper. CONSTITUTION: A stepper(120) comprises a mirror plate(121) and a reflective plate(122). A first fan unit(123a) and a second fan unit(123b) are respectively arranged at the lower side of the mirror plate and the mirror plate. A temperature sensor(124) senses the temperature inside the stepper. A digital differential manometer(115) is prepared between a mask chamber and the stepper. An air spreading nozzle(180) for the reflective plate is combined to the stepper. The air spreading nozzle for the reflective plate spreads air entered in the stepper to the mirror plate in order to prevent the contamination of the mirror plate.</p> |
