Separation, purification and recovery method of SF6, HFCs and PFCs

摘要

A separation, purification and recovery method of SF6, HFCs or PFCs is disclosed, which comprises a step for forming a gas hydrate including components in addition to SF6, HFCs or PFCs. It is possible to separate and recover fluoro-gas at a much lower cost as compared to a conventional method for thereby obtaining an economical effect and preventing an emission of SF6, HFCs or PFCs which corresponds to Non-CO2 having a higher earth warming index, which leads to preventing an earth warming phenomenon. So, the present invention might be widely applied.