发明名称 Split gate oxides for a laterally diffused metal oxide semiconductor (LDMOS)
摘要 An apparatus is disclosed to increase a breakdown voltage of a semiconductor device. The semiconductor device includes a first heavily doped region to represent a source region. A second heavily doped region represents a drain region of the semiconductor device. A third heavily doped region represents a gate region of the semiconductor device. The semiconductor device includes a gate oxide positioned between the source region and the drain region, below the gate region. The semiconductor device uses a split gate oxide architecture to form the gate oxide. The gate oxide includes a first gate oxide having a first thickness and a second gate oxide having a second thickness.
申请公布号 US8203188(B2) 申请公布日期 2012.06.19
申请号 US20090457745 申请日期 2009.06.19
申请人 ITO AKIRO;BROADCOM CORPORATION 发明人 ITO AKIRO
分类号 H01L29/76 主分类号 H01L29/76
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